Ulsi Process Integration 6
Download and Read Ulsi Process Integration 6 full books in PDF, ePUB, and Kindle. Read online free Ulsi Process Integration 6 ebook anywhere anytime directly on your device. We cannot guarantee that every ebooks is available!
ULSI Process Integration 6
Author | : C. Claeys |
Publisher | : The Electrochemical Society |
Total Pages | : 547 |
Release | : 2009-09 |
Genre | : Integrated circuits |
ISBN | : 1566777445 |
Download ULSI Process Integration 6 Book in PDF, Epub and Kindle
ULSI Process Integration 6 covers all aspects of process integration. Sections are devoted to 1) Device Technologies, 2) Front-end-of-line integration (gate stacks, shallow junctions, dry etching, etc.), 3) Back-end-of-line integration (CMP, low-k, Cu interconnect, air-gaps, 3D packaging, etc.), 4) Alternative channel technologies (Ge, III-V, hybrid integration), and 5) Emerging technologies (CNT, graphene, polymer electronics, nanotubes).
ULSI Process Integration 6 Related Books
Language: en
Pages: 547
Pages: 547
Type: BOOK - Published: 2009-09 - Publisher: The Electrochemical Society
ULSI Process Integration 6 covers all aspects of process integration. Sections are devoted to 1) Device Technologies, 2) Front-end-of-line integration (gate sta
Language: en
Pages: 533
Pages: 533
Type: BOOK - Published: 2009 - Publisher:
Language: en
Pages: 408
Pages: 408
Type: BOOK - Published: 1999 - Publisher: The Electrochemical Society
Language: en
Pages: 509
Pages: 509
Type: BOOK - Published: 2007 - Publisher: The Electrochemical Society
The symposium provided a forum for reviewing and discussing all aspects of process integration, with special focus on nanoscaled technologies, 65 nm and beyond
Language: en
Pages: 636
Pages: 636
Type: BOOK - Published: 2001 - Publisher: The Electrochemical Society