The Piezojunction Effect In Silicon Integrated Circuits And Sensors
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The Piezojunction Effect in Silicon Integrated Circuits and Sensors
Author | : Fabiano Fruett |
Publisher | : Springer Science & Business Media |
Total Pages | : 174 |
Release | : 2006-04-18 |
Genre | : Technology & Engineering |
ISBN | : 030648210X |
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This book describes techniques that can reduce mechanical-stress-induced inaccuracy and long-term instability in chips. The authors also show that the piezojunction effect can be applied for new types of mechanical-sensor structures. Thermo-mechanical stress is induced when packaged chips cool down to the temperature of application.
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