Submicron Lithography

Submicron Lithography
Author: Phillip D. Blais
Publisher:
Total Pages: 200
Release: 1982
Genre: Integrated circuits
ISBN:


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Submicron Lithography
Language: en
Pages: 200
Authors: Phillip D. Blais
Categories: Integrated circuits
Type: BOOK - Published: 1982 - Publisher:

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The Physics of Submicron Lithography
Language: en
Pages: 502
Authors: Kamil A. Valiev
Categories: Science
Type: BOOK - Published: 2012-12-06 - Publisher: Springer Science & Business Media

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This book is devoted to the physics of electron-beam, ion-beam, optical, and x-ray lithography. The need for this book results from the following considerations
Submicron Lithography
Language: en
Pages: 0
Authors:
Categories: Photolithography
Type: BOOK - Published: 1982 - Publisher:

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The Physics Of Submicron Lithography
Language: it
Pages: 0
Authors: K.A. Valiev
Categories:
Type: BOOK - Published: - Publisher:

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Lithography for Submicron Structures
Language: en
Pages: 208
Authors:
Categories: Ion beam lithography
Type: BOOK - Published: 1990 - Publisher:

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