Silicon Nitride Silicon Dioxide And Emerging Dielectrics 9
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Silicon Nitride, Silicon Dioxide, and Emerging Dielectrics 9
Author | : Ram Ekwal Sah |
Publisher | : The Electrochemical Society |
Total Pages | : 863 |
Release | : 2007 |
Genre | : Dielectric films |
ISBN | : 1566775523 |
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This issue of ECS Transactions contains the papers presented in the symposium on Silicon Nitride, Silicon Dioxide Thin Insulating Films, and Emerging Dielectics held May 6-11, 2007 in Chicago. Papers were presented on deposition, characterization and applications of the dielectrics including high- and low-k dielectrics, as well as interface states, device characterization, reliabiliy and modeling.
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