Silicon Carbide Thin Films Via Low Pressure Chemical Vapor Deposition For Micro And Nano Electromechanical Systems
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Silicon Carbide Thin Films Via Low Pressure Chemical Vapor Deposition for Micro- and Nano-electromechanical Systems
| Author | : Christopher Stephen Roper |
| Publisher | : |
| Total Pages | : 390 |
| Release | : 2007 |
| Genre | : |
| ISBN | : |
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