Selected Papers on Optical Microlithography

Selected Papers on Optical Microlithography
Author: Harry L. Stover
Publisher:
Total Pages: 708
Release: 1992
Genre: Masks (Electronics).
ISBN:


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SPIE Milestones are collections of seminal papers from the world literature covering important discoveries and developments in optics and photonics.


Selected Papers on Optical Microlithography
Language: en
Pages: 708
Authors: Harry L. Stover
Categories: Masks (Electronics).
Type: BOOK - Published: 1992 - Publisher:

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SPIE Milestones are collections of seminal papers from the world literature covering important discoveries and developments in optics and photonics.
Selected Papers on Resolution Enhancement Techniques in Optical Lithography
Language: en
Pages: 910
Authors: F. M. Schellenberg
Categories: Integrated circuits
Type: BOOK - Published: 2004 - Publisher: SPIE-International Society for Optical Engineering

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Optical lithography for integrated circuits is undergoing a renaissance with the adoption of Resolution Enhancement Technology (RET). Some RET concepts have bec
Selected Papers on Optical Tomography
Language: en
Pages: 746
Authors: Olaf Minet
Categories: Medical
Type: BOOK - Published: 1998 - Publisher: SPIE-International Society for Optical Engineering

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SPIE Milestones are collections of seminal papers from the world literature covering important discoveries and developments in optics and photonics.
Selected Papers on Optical Correlators
Language: en
Pages: 732
Authors: Suganda Jutamulia
Categories: Computers
Type: BOOK - Published: 1993 - Publisher: SPIE-International Society for Optical Engineering

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Optical Microlithography 4
Language: en
Pages:
Authors: Society of Photo-optical Instrumentation Engineers
Categories:
Type: BOOK - Published: - Publisher:

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