Run To Run Control In Semiconductor Manufacturing
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Run-to-Run Control in Semiconductor Manufacturing
Author | : James Moyne |
Publisher | : CRC Press |
Total Pages | : 368 |
Release | : 2018-10-08 |
Genre | : Technology & Engineering |
ISBN | : 1420040669 |
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Run-to-run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine "runs," thereby minimizing process drift, shift, and variability-and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology. Run to Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control.