Plasma Technology
Language: en
Pages: 226
Authors: M. Capitelli
Categories: Science
Type: BOOK - Published: 2012-12-06 - Publisher: Springer Science & Business Media

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The present book contains the proceedings of the workshop "Plasma Technology and Applications" which was held at 11 Ciocco (Lucca-Italy) during 5-6 July 1991. T
Handbook of Plasma Processing Technology
Language: en
Pages: 523
Authors: Stephen M. Rossnagel
Categories: Reference
Type: BOOK - Published: 1990 - Publisher: William Andrew

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This is a comprehensive overview of the technology of plasma-based processing, written by an outstanding group of 29 contributors.
Plasma Process Technology Fundamentals
Language: en
Pages: 390
Authors: George J. Collins
Categories: Plasma (Ionized gases)
Type: BOOK - Published: 1982 - Publisher:

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Plasma Etching
Language: en
Pages: 362
Authors: M. Sugawara
Categories: Technology & Engineering
Type: BOOK - Published: 1998-05-28 - Publisher: OUP Oxford

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The focus of this book is the remarkable advances in understanding of low pressure RF (radio frequency) glow discharges. A basic analytical theory and plasma ph
Plasma Processing of Materials
Language: en
Pages: 88
Authors: National Research Council
Categories: Technology & Engineering
Type: BOOK - Published: 1991-02-01 - Publisher: National Academies Press

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Plasma processing of materials is a critical technology to several of the largest manufacturing industries in the worldâ€"electronics, aerospace, automotive,