Piezoelectric Aluminum Nitride Thin Films by PECVD
Language: en
Pages: 432

Piezoelectric Aluminum Nitride Thin Films by PECVD

Authors: Gustavo Sanchez Mathon
Categories:
Type: BOOK - Published: 2009 - Publisher:

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Polycrystalline aluminum nitride thin films were produced with a microwave-plasma enhanced chemical vapor deposition technique. The plasma-injector distance, th
Aluminum Nitride Thin Films and Structures for Piezoelectric Microelectromechanical Systems (PMEMS) Applications
Language: en
Pages:

Aluminum Nitride Thin Films and Structures for Piezoelectric Microelectromechanical Systems (PMEMS) Applications

Authors: Adam Kabulski
Categories: Aluminum nitride
Type: BOOK - Published: 2008 - Publisher:

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Effect of Interface Fields on the Piezoelectric Response of Aluminum Nitride Thin Films
Language: en
Pages:

Effect of Interface Fields on the Piezoelectric Response of Aluminum Nitride Thin Films

Authors: John Preston Harman
Categories: Aluminum nitride
Type: BOOK - Published: 2008 - Publisher:

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Aluminum Nitride Piezoelectric Thin Films Reactively Deposited in Closed Field Unbalanced Magnetron Sputtering for Elevated Temperature 'smart' Tribological Applications
Language: en
Pages: 168

Aluminum Nitride Piezoelectric Thin Films Reactively Deposited in Closed Field Unbalanced Magnetron Sputtering for Elevated Temperature 'smart' Tribological Applications

Authors: Masood Hasheminiasari
Categories: Aluminum nitride
Type: BOOK - Published: 2013 - Publisher:

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Piezoelectric Aluminum Nitride Films
Language: en
Pages: 139

Piezoelectric Aluminum Nitride Films

Authors: Michael T. Duffy
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Type: BOOK - Published: 1975 - Publisher:

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Piezoelectric films of AlN and GaN were grown on sapphire substrates for use in the generation, propagation, and processing of surface acoustic waves. The films