Piezoelectric Aluminium Scandium Nitride Alscn Thin Films

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Language: en
Pages: 0

Piezoelectric Aluminium Scandium Nitride (AlScN) Thin Films

Authors: Agnė Žukauskaitė

Categories: Piezoelectric devices

Type: BOOK - Published: 2023 - Publisher:

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Recently, aluminium scandium nitride (AlScN) emerged as a material with superior properties compared to aluminium nitride (AlN). Substituting Al with Sc in AlN

Language: en
Pages: 432

Piezoelectric Aluminum Nitride Thin Films by PECVD

Authors: Gustavo Sanchez Mathon

Categories:

Type: BOOK - Published: 2009 - Publisher:

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Polycrystalline aluminum nitride thin films were produced with a microwave-plasma enhanced chemical vapor deposition technique. The plasma-injector distance, th

Language: en
Pages: 180

Development of High Performance Piezoelectric AlScN for Microelectromechanical Systems: Towards a Ferroelectric Wurtzite Structure

Authors: Simon Fichtner

Categories: Science

Type: BOOK - Published: 2020-02-18 - Publisher: BoD – Books on Demand

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The usage of piezoelectric and ferroelectric thin films is a promising approach to significantly increase the functionality of microelectromechanical systems (M