Maskless Micro Ion Beam Reduction Lithography System
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Experimental Demonstration of a Prototype Maskless Micro-ion-beam Reduction Lithography System
| Author | : Vinh Van Ngo |
| Publisher | : |
| Total Pages | : 412 |
| Release | : 2004 |
| Genre | : |
| ISBN | : |
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A proof-of-principle ion projection lithography (IPL) system called Maskless Micro-ion beam Reduction Lithography (MMRL) has been developed and tested at the La
