Low Dielectric Constant Materials
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Low Dielectric Constant Materials for IC Applications
| Author | : Paul S. Ho |
| Publisher | : Springer Science & Business Media |
| Total Pages | : 323 |
| Release | : 2012-12-06 |
| Genre | : Technology & Engineering |
| ISBN | : 3642559085 |
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Low dielectric constant materials are an important component of microelectronic devices. This comprehensive book covers the latest low-dielectric-constant (low-k) materials technology, thin film materials characterization, integration and reliability for back-end interconnects and packaging applications in microelectronics. Highly informative contributions from leading academic and industrial laboratories provide comprehensive information about materials technologies for
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