Low Damage Etching of III-V Semiconductors for the Fabrication of Nanoelectronic Devices

Low Damage Etching of III-V Semiconductors for the Fabrication of Nanoelectronic Devices
Author: Erik W. Berg
Publisher:
Total Pages: 454
Release: 2000
Genre:
ISBN:
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Low Damage Etching of III-V Semiconductors for the Fabrication of Nanoelectronic Devices
Language: en
Pages: 454

Low Damage Etching of III-V Semiconductors for the Fabrication of Nanoelectronic Devices

Authors: Erik W. Berg
Categories:
Type: BOOK - Published: 2000 - Publisher:

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Etching of III-V Semiconductors
Language: en
Pages: 376

Etching of III-V Semiconductors

Authors: Peter H. L. Notten
Categories: Technology & Engineering
Type: BOOK - Published: 1991 - Publisher: Elsevier Science & Technology

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Low Damage Etching for Fabrication of Quantum Effect Devices
Language: en
Pages: 406

Low Damage Etching for Fabrication of Quantum Effect Devices

Authors: King Wai Kelwin Ko
Categories:
Type: BOOK - Published: 1996 - Publisher:

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Low Energy Electron Enhanced Etching for Damage-free Fabrication of Nanometer-scale Quantum Devices
Language: en
Pages:

Low Energy Electron Enhanced Etching for Damage-free Fabrication of Nanometer-scale Quantum Devices

Authors: Harry Patton Gillis
Categories: Electrons
Type: BOOK - Published: 1993 - Publisher:

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A Study of the Role of Low Energy Ions in Causing Damage to III-V Semiconductors in Practical Ion Etching Systems
Language: en
Pages: 132

A Study of the Role of Low Energy Ions in Causing Damage to III-V Semiconductors in Practical Ion Etching Systems

Authors: Ligang Deng
Categories:
Type: BOOK - Published: 2000 - Publisher:

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