Ion Implantation Annealing Charact4rization And Device Development In Beta Silicon Carbide Single Crystalline Thin Films
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Ion Implantation, Annealing, Charact4rization and Device Development in Beta-silicon Carbide Single Crystalline Thin Films
Author | : Jaesok Ryu |
Publisher | : |
Total Pages | : 464 |
Release | : 1986 |
Genre | : |
ISBN | : |
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