Development Of Nano Structured Thin Film Shape Memory Alloys For Mems Applications
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Development of Nano-structured Thin Film Shape Memory Alloys for MEMS Applications
| Author | : Elizabeth Anne Baldwin |
| Publisher | : |
| Total Pages | : 179 |
| Release | : 2004 |
| Genre | : |
| ISBN | : |
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Keywords: SMA, shape memory alloys, TiPdNi, ion beam assisted deposition, IBAD.
