Chemical Mechanical Planarization In Ic Device Manufacturing Iii
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Chemical Mechanical Planarization in IC Device Manufacturing III
| Author | : Robert Leon Opila |
| Publisher | : The Electrochemical Society |
| Total Pages | : 664 |
| Release | : 2000 |
| Genre | : Technology & Engineering |
| ISBN | : 9781566772600 |
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This volume contains the proceedings of the third international symposium on Chemical Mechanical Planarization integrated circuit device manufacturing held at the 196th Meeting of the Electrochemical Society in Honolulu, Hawaii. ( October 20 -22 1999).
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