Characterization of Piezoelectric AIN Thin Films Deposited on Silicon by RF Reactive Magnetron Sputtering at Low Temperature for Acoustic Wave Devices [microform]

Characterization of Piezoelectric AIN Thin Films Deposited on Silicon by RF Reactive Magnetron Sputtering at Low Temperature for Acoustic Wave Devices [microform]
Author: Akhtar Mirfazli
Publisher: National Library of Canada = Bibliothèque nationale du Canada
Total Pages: 192
Release: 2004
Genre: Acoustic surface wave devices
ISBN: 9780612939431
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Characterization of Piezoelectric AIN Thin Films Deposited on Silicon by RF Reactive Magnetron Sputtering at Low Temperature for Acoustic Wave Devices [microform]
Language: en
Pages: 192

Characterization of Piezoelectric AIN Thin Films Deposited on Silicon by RF Reactive Magnetron Sputtering at Low Temperature for Acoustic Wave Devices [microform]

Authors: Akhtar Mirfazli
Categories: Acoustic surface wave devices
Type: BOOK - Published: 2004 - Publisher: National Library of Canada = Bibliothèque nationale du Canada

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Optical Characterization of Annealed Silicon Carbide (SIC) Thin Film Deposited by RF Magnetron Sputtering Technique
Language: en
Pages: 54

Optical Characterization of Annealed Silicon Carbide (SIC) Thin Film Deposited by RF Magnetron Sputtering Technique

Authors: Kartiyani Muniandy
Categories:
Type: BOOK - Published: 2008 - Publisher:

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Physics Briefs
Language: en
Pages: 936

Physics Briefs

Authors:
Categories: Physics
Type: BOOK - Published: 1990 - Publisher:

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Reactive Ion Enhanced Magnetron Sputtering of Nitride Thin Films
Language: en
Pages: 0

Reactive Ion Enhanced Magnetron Sputtering of Nitride Thin Films

Authors: Al-Ahsan Talukder
Categories: Electronic dissertations
Type: BOOK - Published: 2022 - Publisher:

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Magnetron sputtering is a popular vacuum plasma coating technique used for depositing metals, dielectrics, semiconductors, alloys, and compounds onto a wide ran
Advanced Strategies in Thin Film Engineering by Magnetron Sputtering
Language: en
Pages: 148

Advanced Strategies in Thin Film Engineering by Magnetron Sputtering

Authors: Alberto Palmero
Categories: Science
Type: BOOK - Published: 2020-12-10 - Publisher: MDPI

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Recent years have witnessed the flourishing of numerous novel strategies based on the magnetron sputtering technique aimed at the advanced engineering of thin f