Characterization, integration and reliability of HfO2 and LaLuO3 high-κ/metal gate stacks for CMOS applications

Characterization, integration and reliability of HfO2 and LaLuO3 high-κ/metal gate stacks for CMOS applications
Author: Alexander Nichau
Publisher: Forschungszentrum Jülich
Total Pages: 199
Release: 2014-04-03
Genre:
ISBN: 3893368981


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Characterization, integration and reliability of HfO2 and LaLuO3 high-κ/metal gate stacks for CMOS applications
Language: en
Pages: 199
Authors: Alexander Nichau
Categories:
Type: BOOK - Published: 2014-04-03 - Publisher: Forschungszentrum Jülich

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Characterization, Integration and Reliability of HfO2 and LaLuO3 High-kappa/metal Gate Stacks for CMOS Applications
Language: en
Pages:
Characterization, Integration and Reliability of HfO 2 and LaLuO 3 High-kappa-metal Gate Stacks for CMOS Applications
Language: en
Pages: 0
Characterization, Integration and Reliability of HfO_1tn2 and LaLuO_1tn3 High-_k63-metal [high-kappa-metal] Gate Stacks for CMOS Applications
Language: en
Pages: 179
Resistive switching in ZrO2 based metal-oxide-metal structures
Language: en
Pages: 151
Authors: Irina Kärkkänen
Categories:
Type: BOOK - Published: 2014 - Publisher: Forschungszentrum Jülich

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