Aluminum Nitride Thin Films For Mems Resonators
Download and Read Aluminum Nitride Thin Films For Mems Resonators full books in PDF, ePUB, and Kindle. Read online free Aluminum Nitride Thin Films For Mems Resonators ebook anywhere anytime directly on your device. We cannot guarantee that every ebooks is available!
Aluminum Nitride Thin Films for MEMS Resonators
Author | : Vanni Lughi |
Publisher | : |
Total Pages | : 530 |
Release | : 2006 |
Genre | : |
ISBN | : 9780542681318 |
Download Aluminum Nitride Thin Films for MEMS Resonators Book in PDF, Epub and Kindle
High quality aluminum nitride films, meeting all the requirements for the fabrication of the resonators, were deposited at low temperature (
Aluminum Nitride Thin Films for MEMS Resonators Related Books
Language: en
Pages: 530
Pages: 530
Type: BOOK - Published: 2006 - Publisher:
High quality aluminum nitride films, meeting all the requirements for the fabrication of the resonators, were deposited at low temperature (
Language: en
Pages: 423
Pages: 423
Type: BOOK - Published: 2017-01-09 - Publisher: Springer
This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element
Language: en
Pages: 61
Pages: 61
Type: BOOK - Published: 1999-10-01 - Publisher:
Microelectromechanical systems (MEMS) often incorporate piezoelectric thin films to actuate and detect motion of mechanical structures. Aluminum nitride is adva
Language: en
Pages: 512
Pages: 512
Type: BOOK - Published: 2015-06-08 - Publisher: John Wiley & Sons
Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It
Language: en
Pages: 390
Pages: 390
Type: BOOK - Published: 2011 - Publisher:
The design and fabrication of MEMS Inertial Sensors (both accelerometers and gyroscopes) made of Aluminum Nitride (AlN) is described in this dissertation. The g