Aluminum Nitride Thin Films and Structures for Piezoelectric Microelectromechanical Systems (PMEMS) Applications

Aluminum Nitride Thin Films and Structures for Piezoelectric Microelectromechanical Systems (PMEMS) Applications
Author: Adam Kabulski
Publisher:
Total Pages:
Release: 2008
Genre: Aluminum nitride
ISBN:
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Aluminum Nitride Thin Films and Structures for Piezoelectric Microelectromechanical Systems (PMEMS) Applications
Language: en
Pages:

Aluminum Nitride Thin Films and Structures for Piezoelectric Microelectromechanical Systems (PMEMS) Applications

Authors: Adam Kabulski
Categories: Aluminum nitride
Type: BOOK - Published: 2008 - Publisher:

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Aluminum Nitride Thin Films - Deposition for Fabrication, Characterization and Fabrication of Surface Acoustic Wave Devices
Language: en
Pages: 124

Aluminum Nitride Thin Films - Deposition for Fabrication, Characterization and Fabrication of Surface Acoustic Wave Devices

Authors: Charlee Fansler
Categories: Technology & Engineering
Type: BOOK - Published: 2008 - Publisher:

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Aluminum Nitride (AlN) thin films can be used for many device applications; for example, Surface Acoustic Wave (SAW) devices, microelectromechanical systems (ME
Piezoelectric MEMS Resonators
Language: en
Pages: 423

Piezoelectric MEMS Resonators

Authors: Harmeet Bhugra
Categories: Technology & Engineering
Type: BOOK - Published: 2017-01-09 - Publisher: Springer

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This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element
Piezoelectric Aluminum Nitride Thin Films by PECVD
Language: en
Pages: 432

Piezoelectric Aluminum Nitride Thin Films by PECVD

Authors: Gustavo Sanchez Mathon
Categories:
Type: BOOK - Published: 2009 - Publisher:

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Polycrystalline aluminum nitride thin films were produced with a microwave-plasma enhanced chemical vapor deposition technique. The plasma-injector distance, th
Piezoelectric Aluminium Scandium Nitride (AlScN) Thin Films
Language: en
Pages: 0

Piezoelectric Aluminium Scandium Nitride (AlScN) Thin Films

Authors: Agne Zukauskaite
Categories: Science
Type: BOOK - Published: 2023-06-14 - Publisher: Mdpi AG

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Recently, aluminium scandium nitride (AlScN) emerged as a material with superior properties compared to aluminium nitride (AlN). Substituting Al with Sc in AlN