Ultra Clean Processing Of Semiconductor Surfaces Viii
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Ultra Clean Processing of Semiconductor Surfaces VIII
Author | : Paul Mertens |
Publisher | : Trans Tech Publications Ltd |
Total Pages | : 400 |
Release | : 2007-11-20 |
Genre | : Technology & Engineering |
ISBN | : 3038131954 |
Download Ultra Clean Processing of Semiconductor Surfaces VIII Book in PDF, Epub and Kindle
Volume is indexed by Thomson Reuters CPCI-S (WoS). This collection of 86 peer-reviewed papers covers all aspects of the use of ultra-clean technology for large-scale integration on semiconductors, and cleaning and contamination-control in both front-end-of-line (FEOL) and back-end-of-line (BEOL) processing.
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