Ulsi Process Integration
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ULSI Process Integration
Author | : Cor L. Claeys |
Publisher | : The Electrochemical Society |
Total Pages | : 408 |
Release | : 1999 |
Genre | : Computers |
ISBN | : 9781566772419 |
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The symposium provided a forum for reviewing and discussing all aspects of process integration, with special focus on nanoscaled technologies, 65 nm and beyond
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Type: BOOK - Published: 2011 - Publisher: The Electrochemical Society