Thin Polycrystalline Films Of Indium Phosphide On Low Cost Substrates
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Thin Polycrystalline Films of Indium Phosphide on Low-cost Substrates
| Author | : Ralph Powers Ruth |
| Publisher | : |
| Total Pages | : 80 |
| Release | : 1977 |
| Genre | : Indium ores |
| ISBN | : |
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The program is intended to develop the metalorganic chemical vapor deposition (MO-CVD) process for growth of InP films using triethylindium (TEI) and phosphine
