The MEMS Handbook
Language: en
Pages: 1386
Authors: Mohamed Gad-el-Hak
Categories: Technology & Engineering
Type: BOOK - Published: 2001-09-27 - Publisher: CRC Press

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The revolution is well underway. Our understanding and utilization of microelectromechanical systems (MEMS) are growing at an explosive rate with a worldwide ma
The MEMS Handbook, Second Edition - 3 Volume Set
Language: en
Pages: 1720
Authors: Mohamed Gad-el-Hak
Categories: Technology & Engineering
Type: BOOK - Published: 2005-12-22 - Publisher: CRC Press

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As our knowledge of MEMS continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes.
MEMS
Language: en
Pages: 504
Authors: Mohamed Gad-el-Hak
Categories: Technology & Engineering
Type: BOOK - Published: 2005-11-29 - Publisher: CRC Press

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As our knowledge of MEMS continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes.
MEMS
Language: en
Pages: 488
Authors: Mohamed Gad-el-Hak
Categories: Technology & Engineering
Type: BOOK - Published: 2005-11-29 - Publisher: CRC Press

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As our knowledge of MEMS continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes.
Handbook of Silicon Based MEMS Materials and Technologies
Language: en
Pages: 670
Authors: Markku Tilli
Categories: Technology & Engineering
Type: BOOK - Published: 2009-12-08 - Publisher: Elsevier

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A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applica