The Ion Beam Reactive Sputtering Process For Deposition Of Niobium Nitride Thin Films
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The Ion-beam Reactive Sputtering Process for Deposition of Niobium Nitride Thin Films
Author | : Daniel Jenner Lichtenwalner |
Publisher | : |
Total Pages | : 658 |
Release | : 1990 |
Genre | : |
ISBN | : |
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