Series On Emission Scenario Documents Chemicals Vapour Deposition In The Semiconductor Industry
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Series on Emission Scenario Documents Chemicals Vapour Deposition in the Semiconductor Industry
Author | : OECD |
Publisher | : OECD Publishing |
Total Pages | : 80 |
Release | : 2015-04-03 |
Genre | : |
ISBN | : 9264502432 |
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This OECD Emission Scenario Document (ESD) provides information on the sources, use patterns, and potential release pathways of chemicals used as chemical vapour deposition (CVD) precursors in the semiconductor industry. The document presents standard approaches for estimating environmental releases and occupational exposures, and discusses the typical engineering controls used to mitigate exposure to CVD precursors.
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