Semiconductor Strain Metrology
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Semiconductor Strain Metrology
| Author | : Terence K. S. Wong |
| Publisher | : Bentham Science Publishers |
| Total Pages | : 141 |
| Release | : 2012 |
| Genre | : Technology & Engineering |
| ISBN | : 1608053598 |
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This book surveys the major and newly developed techniques for semiconductor strain metrology. Semiconductor strain metrology has emerged in recent years as a topic of great interest to researchers involved in thin film and nanoscale device characterizati
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