Selective Epitaxial Growth Of Silicon Carbide On Silicon And Silicon Carbide Substrates By Chemical Vapor Deposition
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Selective Epitaxial Growth of Silicon Carbide on Silicon and Silicon Carbide Substrates by Chemical Vapor Deposition
Author | : Brandy Kay Burkland |
Publisher | : |
Total Pages | : 166 |
Release | : 2001 |
Genre | : |
ISBN | : |
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