Resolution Enhancement Techniques in Optical Lithography
Language: en
Pages: 238
Authors: Alfred Kwok-Kit Wong
Categories: Science
Type: BOOK - Published: 2001 - Publisher: SPIE Press

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Ever-smaller IC devices are pushing the optical lithography envelope, increasing the importance of resolution enhancement techniques. This tutorial encompasses
Selected Papers on Resolution Enhancement Techniques in Optical Lithography
Language: en
Pages: 910
Authors: F. M. Schellenberg
Categories: Integrated circuits
Type: BOOK - Published: 2004 - Publisher: SPIE-International Society for Optical Engineering

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Optical lithography for integrated circuits is undergoing a renaissance with the adoption of Resolution Enhancement Technology (RET). Some RET concepts have bec
Design and Development of Material-based Resolution Enhancement Techniques for Optical Lithography
Language: en
Pages: 552
Authors: Xinyu Gu
Categories:
Type: BOOK - Published: 2011 - Publisher:

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The relentless commercial drive for smaller, faster, and cheaper semi-conductor devices has pushed the existing patterning technologies to their limits. Photoli
Resolution Enhancement Techniques in Deep UV Optical Lithography for the 90nm Silicon Technological Node and Below
Language: en
Pages:
Optimization of Resolution Enhancement Techniques in Optical Lithography
Language: en
Pages:
Authors:
Categories: Imaging systems
Type: BOOK - Published: 2009 - Publisher:

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As todays' semiconductor fabrication industry tries to keep up with Moore's Law, which predicts the downscaling of integrated circuit size and the doubling of t