Pulsed Dc Reactive Magnetron Sputtering Of Aluminum Nitride Thin Films
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Pulsed DC Reactive Magnetron Sputtering of Aluminum Nitride Thin Films
| Author | : Jung Won Cho |
| Publisher | : |
| Total Pages | : 227 |
| Release | : 2002 |
| Genre | : |
| ISBN | : |
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Keywords: plasma diagnostics, thermal conductivity, AlN, pulsed DC sputtering.
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