Proceedings of the International Conference on Integration and Commercialization of Micro and Nanosystems, 2007: Micro and nano fluidics ; Micro and nano manufacturing ; Metrology and control ; Commercialization of micro and nano technology ; General

Proceedings of the International Conference on Integration and Commercialization of Micro and Nanosystems, 2007: Micro and nano fluidics ; Micro and nano manufacturing ; Metrology and control ; Commercialization of micro and nano technology ; General
Author:
Publisher:
Total Pages: 794
Release: 2007
Genre: Microelectromechanical systems
ISBN:


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