Predictive Simulation Of Semiconductor Processing
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Predictive Simulation of Semiconductor Processing
Author | : Jarek Dabrowski |
Publisher | : Springer Science & Business Media |
Total Pages | : 505 |
Release | : 2013-03-09 |
Genre | : Technology & Engineering |
ISBN | : 3662094320 |
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Predictive Simulation of Semiconductor Processing enables researchers and developers to extend the scaling range of semiconductor devices beyond the parameter range of empirical research. It requires a thorough understanding of the basic mechanisms employed in device fabrication, such as diffusion, ion implantation, epitaxy, defect formation and annealing, and contamination. This book presents an in-depth discussion of our current understanding of key processes and identifies areas that require further work in order to achieve the goal of a comprehensive, predictive process simulation tool.
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