Particle Control For Semiconductor Manufacturing
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Particle Control for Semiconductor Manufacturing
Author | : Donovan |
Publisher | : Routledge |
Total Pages | : 484 |
Release | : 2018-05-04 |
Genre | : Science |
ISBN | : 1351425749 |
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There is something Alice-in-Wonderlandish about powerful and vital computer systems being shut down by a microscopic mote that a hay-feverist wouldn't sneeze at, but as computer chips get smaller, smaller and smaller particles on their surface have a larger and larger effect on their performance. In
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