Micromachined Microwave Devices And Circuits

"In this book, new results on the development of micromachined circuits in the millimeter wave range, based on micromachining of Silicon as well as of III-V compounds, are presented. Original approach in design using high performance electromagnetic simulation software is also well illustrated. Electrical and microphysical characterization methods are included. The authors are representative for the European activities in the so-called ""RF MEMS"" (Radio-Frequency Micro-Electro-Mechanical Systems) field, a very hot topic in research and development."