Handbook of Microlithography, Micromachining, and Microfabrication: Microlithography

Handbook of Microlithography, Micromachining, and Microfabrication: Microlithography
Author: P. Rai-Choudhury
Publisher: IET
Total Pages: 784
Release: 1997
Genre: Technology & Engineering
ISBN: 9780852969069


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Focusing on the use of microlithography techniques in microelectronics manufacturing, this volume is one of a series addressing a rapidly growing field affecting the integrated circuit industry. New applications in such areas as sensors, actuators and biomedical devices, are described.


Handbook of Microlithography, Micromachining, and Microfabrication: Microlithography
Language: en
Pages: 784
Authors: P. Rai-Choudhury
Categories: Technology & Engineering
Type: BOOK - Published: 1997 - Publisher: IET

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Focusing on the use of microlithography techniques in microelectronics manufacturing, this volume is one of a series addressing a rapidly growing field affectin
Microlithography
Language: en
Pages: 864
Authors: Bruce W. Smith
Categories: Technology & Engineering
Type: BOOK - Published: 2018-10-03 - Publisher: CRC Press

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This new edition of the bestselling Microlithography: Science and Technology provides a balanced treatment of theoretical and operational considerations, from e
Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology
Language: en
Pages: 336
Authors: Saburo Nonogaki
Categories: Technology & Engineering
Type: BOOK - Published: 2018-10-08 - Publisher: CRC Press

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"Explores the science and technology of lithographic processes and resist materials and summarizes the most recent innovations in semiconductor manufacturing. C
Microlithography/Molecular Imprinting
Language: en
Pages: 296
Authors:
Categories: Technology & Engineering
Type: BOOK - Published: 2005-02-18 - Publisher: Springer Science & Business Media

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1. J.D. Marty, M. Mauzac: Molecular Imprinting: State of the Art and Perspectives.- 2. H. Ito: Chemical Amplification Resists for Microlithography
Handbook of VLSI Microlithography
Language: en
Pages: 671
Authors: William B. Glendinning
Categories: Technology & Engineering
Type: BOOK - Published: 2012-12-02 - Publisher: William Andrew

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This handbook gives readers a close look at the entire technology of printing very high resolution and high density integrated circuit (IC) patterns into thin r