Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set

Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set
Author: Marc J. Madou
Publisher: CRC Press
Total Pages: 1992
Release: 2018-12-14
Genre: Technology & Engineering
ISBN: 1482274663


Download Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set Book in PDF, Epub and Kindle

Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to provide the most complete MEMS coverage available. Thoroughly revised and updated the new edition of this perennial bestseller has been expanded to three volumes, reflecting the substantial growth of this field. It includes a wealth of theoretical and practical information on nanotechnology and NEMS and offers background and comprehensive information on materials, processes, and manufacturing options. The first volume offers a rigorous theoretical treatment of micro- and nanosciences, and includes sections on solid-state physics, quantum mechanics, crystallography, and fluidics. The second volume presents a very large set of manufacturing techniques for micro- and nanofabrication and covers different forms of lithography, material removal processes, and additive technologies. The third volume focuses on manufacturing techniques and applications of Bio-MEMS and Bio-NEMS. Illustrated in color throughout, this seminal work is a cogent instructional text, providing classroom and self-learners with worked-out examples and end-of-chapter problems. The author characterizes and defines major research areas and illustrates them with examples pulled from the most recent literature and from his own work.


Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set
Language: en
Pages: 1992
Authors: Marc J. Madou
Categories: Technology & Engineering
Type: BOOK - Published: 2018-12-14 - Publisher: CRC Press

GET EBOOK

Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to provide the most complete MEMS coverage available. Thoroughly revised
Micro and Nano Fabrication
Language: en
Pages: 537
Authors: Hans H. Gatzen
Categories: Technology & Engineering
Type: BOOK - Published: 2015-01-02 - Publisher: Springer

GET EBOOK

For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book prov
Micro and Nano Fabrication Technology
Language: en
Pages: 0
Authors: Jiwang Yan
Categories: Technology & Engineering
Type: BOOK - Published: 2018-07-16 - Publisher: Springer

GET EBOOK

This volume focuses on the state-of-the-art micro/nanofabrication technologies for creating miniature structures with high precision. These multidisciplinary te
Nano- and Microfabrication for Industrial and Biomedical Applications
Language: en
Pages: 280
Authors: Regina Luttge
Categories: Technology & Engineering
Type: BOOK - Published: 2016-06-12 - Publisher: William Andrew

GET EBOOK

Nano- and Microfabrication for Industrial and Biomedical Applications, Second Edition, focuses on the industrial perspective on micro- and nanofabrication metho
Introduction to Microfabrication
Language: en
Pages: 424
Authors: Sami Franssila
Categories: Technology & Engineering
Type: BOOK - Published: 2005-01-28 - Publisher: John Wiley & Sons

GET EBOOK

Microfabrication is the key technology behind integrated circuits,microsensors, photonic crystals, ink jet printers, solar cells andflat panel displays. Microsy