Micro Nanofabrication Process Development And Device Characterization Towards Tri Modal Optical Electrical And Microfluidic 3d Microelectrode Arrays 3d Meas

A polymer and metal-based microfabrication technology was fabricated toward 3D Microelectrode Arrays (3D MEAs) with tri-modal functionality for obtaining simultaneous data sets comprising electrical, optical, and microfluidic markers from a variety of electrogenic cellular constructs. 3D MEAs are the next generation interfaces to transduce multi-modal data sets from the burgeoning field of “organ-on-a-chip” in vitro modeling of biological functions. The microfabrication process is fully characterized including key processes of microdrilling/micromilling for low and higher density 3D electrodes/ microfluidic ([microfarad]) ports along with full spectrum impedance and RMS noise showcasing the ability to control the 3D microelectrode size. Further the material set used in the microfabrication process is characterized for biological metrics through both a novel transparency assay along with a biocompatibility assay with multiple electrogenic cell culture systems. Impedance metrics showcasing morphology and spread of electrogenic cells are further analyzed. Lastly, rapid neuronal spheroid attachment to the 3D microfluidic ports of the tri-modal 3D MEA is demonstrated successfully.