Metal Impurities In Silicon And Germanium Based Technologies
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Metal Impurities in Silicon- and Germanium-Based Technologies
Author | : Cor Claeys |
Publisher | : Springer |
Total Pages | : 464 |
Release | : 2018-08-13 |
Genre | : Technology & Engineering |
ISBN | : 3319939254 |
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This book provides a unique review of various aspects of metallic contamination in Si and Ge-based semiconductors. It discusses all of the important metals including their origin during crystal and/or device manufacturing, their fundamental properties, their characterization techniques and their impact on electrical devices’ performance. Several control and possible gettering approaches are addressed. The book offers a valuable reference guide for all researchers and engineers studying advanced and state-of-the-art micro- and nano-electronic semiconductor devices and circuits. Adopting an interdisciplinary approach, it combines perspectives from e.g. material science, defect engineering, device processing, defect and device characterization, and device physics and engineering.
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