Mems Mechanical Sensors
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MEMS Mechanical Sensors
Author | : Stephen Beeby |
Publisher | : Artech House |
Total Pages | : 282 |
Release | : 2004 |
Genre | : Technology & Engineering |
ISBN | : 1580535364 |
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Here's the book to keep handy when you have to overcome obstacles in design, simulation, fabrication and application of MEMS sensors. This practical guide to design tools and packaging helps you create the sensors you need for the full range of mechanical microsensor applications. Critical physical sensing techniques covered include piezoresistive, piezoelectric, capacative, optical, resonant, actuation, thermal, and magnetic, as well as smart sensing.
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