Low-temperature deposition of epitaxial transition metal carbide films and superlattices using C[sub]60 as carbon source

Low-temperature deposition of epitaxial transition metal carbide films and superlattices using C[sub]60 as carbon source
Author: Hans Högberg
Publisher: Uppsala Universitet
Total Pages: 55
Release: 2000
Genre: Science
ISBN: 9789155446451


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Low-temperature deposition of epitaxial transition metal carbide films and superlattices using C[sub]60 as carbon source
Language: en
Pages: 55
Authors: Hans Högberg
Categories: Science
Type: BOOK - Published: 2000 - Publisher: Uppsala Universitet

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Low Temperature Deposition of Metal Carbide Films from Single Source Precursors
Language: en
Pages: 146
Authors: Rubiano Ray Rubiano
Categories:
Type: BOOK - Published: 1994 - Publisher:

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Low Temperature Epitaxial Growth of Semiconductors
Language: en
Pages: 356
Authors: Takashi Hariu
Categories: Technology & Engineering
Type: BOOK - Published: 1991 - Publisher: World Scientific

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Low temperature processes for semiconductors have been recently under intensive development to fabricate controlled device structures with minute dimensions in
Epitaxial Growth of Silicon Carbide on On-axis Silicon Carbide Substrates Using Methyltrichlorosilane Chemical Vapor Deposition
Language: en
Pages:
Authors:
Categories:
Type: BOOK - Published: 2008 - Publisher:

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4H-silicon carbide (4H-SiC) is a wide band gap semiconductor with outstanding capabilities for high temperature, high power, and high frequency electronic devic
Chemical Vapor Deposition of Epitaxial Silicon-germanium-carbon Alloys Using Cyclopropane as a Carbon Source Gas
Language: en
Pages: 406