Low Dielectric Constant Materials and Processes for Interlayer Dielectric Applications

Low Dielectric Constant Materials and Processes for Interlayer Dielectric Applications
Author: Ramakrishna Vedula
Publisher:
Total Pages: 102
Release: 2006
Genre: Dielectric films
ISBN:


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Low Dielectric Constant Materials and Processes for Interlayer Dielectric Applications
Language: en
Pages: 102
Authors: Ramakrishna Vedula
Categories: Dielectric films
Type: BOOK - Published: 2006 - Publisher:

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Handbook of Low and High Dielectric Constant Materials and Their Applications, Two-Volume Set
Language: en
Pages: 562
Authors: Hari Singh Nalwa
Categories: Science
Type: BOOK - Published: 1999-09-07 - Publisher: Elsevier

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Recent developments in microelectronics technologies have created a great demand for interlayer dielectric materials with a very low dielectric constant. They w
Study and Characterization of Low Dielectric Constant Materials for Interlayer Dielectric Applications
Language: en
Pages: 69
Authors: Babu Narayanan
Categories:
Type: BOOK - Published: 2003 - Publisher:

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High Dielectric Constant Materials
Language: en
Pages: 740
Authors: Howard Huff
Categories: Science
Type: BOOK - Published: 2005 - Publisher: Springer Science & Business Media

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Issues relating to the high-K gate dielectric are among the greatest challenges for the evolving International Technology Roadmap for Semiconductors (ITRS). Mor
Interlayer Dielectrics for Semiconductor Technologies
Language: en
Pages: 459
Authors: Shyam P Muraka
Categories: Science
Type: BOOK - Published: 2003-10-13 - Publisher: Elsevier

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Semiconductor technologies are moving at such a fast pace that new materials are needed in all types of application. Manipulating the materials and their proper