Integration Of Functional Oxides Onto Silicon Substrates
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Integration of Functional Oxides Onto Silicon Substrates
Author | : Hanu K. Arava |
Publisher | : |
Total Pages | : 134 |
Release | : 2014 |
Genre | : Microelectronics |
ISBN | : |
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The purpose of this thesis is to investigate the integration of functional oxides onto silicon substrates using MBE and Spin-Coating techniques. Functionality is defined, by Materials Department of Imperial College of London, as any property in a material that is not load-bearing in nature. Examples of functionalities that are not load-bearing include magnetic, electric, electro-optic, pyroelectric and many more unique types of behavior. More-than-Moore is the primary motivation within the thesis. Unlike the standard Moore's Law predicting the doubling of semiconductor devices onto a single microchip, More-than-Moore looks into increasing functionality in a single microchip.
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