High Density Arrays Of Micromirrors
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High Density Arrays of Micromirrors
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| Release | : 1999 |
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We established and achieved our goal to (1) fabricate and evaluate test structures based on the micromirror design optimized for maskless lithography applications, (2) perform system analysis and code development for the maskless lithography concept, and (3) identify specifications for micromirror arrays (MMAs) for LLNL s adaptive optics (AO) applications and conceptualize new devices.
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