Handbook Of Silicon Semiconductor Metrology
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Handbook of Silicon Semiconductor Metrology
Author | : Alain C. Diebold |
Publisher | : CRC Press |
Total Pages | : 703 |
Release | : 2001-06-29 |
Genre | : Technology & Engineering |
ISBN | : 0203904540 |
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Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs, this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, critical dimension, overlay
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