Handbook of Silicon Semiconductor Metrology

Handbook of Silicon Semiconductor Metrology
Author: Alain C. Diebold
Publisher: CRC Press
Total Pages: 703
Release: 2001-06-29
Genre: Technology & Engineering
ISBN: 0203904540


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Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs, this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, critical dimension, overlay


Handbook of Silicon Semiconductor Metrology
Language: en
Pages: 703
Authors: Alain C. Diebold
Categories: Technology & Engineering
Type: BOOK - Published: 2001-06-29 - Publisher: CRC Press

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Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs, this reference surveys key areas such as optical measurements and in-l
National Semiconductor Metrology Program
Language: en
Pages: 144
Authors: National Institute of Standards and Technology (U.S.)
Categories: Semiconductors
Type: BOOK - Published: 1996 - Publisher:

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Handbook of Critical Dimension Metrology and Process Control
Language: en
Pages: 376
Authors: Kevin M. Monahan
Categories: Technology & Engineering
Type: BOOK - Published: 1994 - Publisher: SPIE-International Society for Optical Engineering

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Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics
Handbook of Semiconductor Manufacturing Technology
Language: en
Pages: 1720
Authors: Yoshio Nishi
Categories: Technology & Engineering
Type: BOOK - Published: 2017-12-19 - Publisher: CRC Press

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Retaining the comprehensive and in-depth approach that cemented the bestselling first edition's place as a standard reference in the field, the Handbook of Semi
Handbook of Metrology and Applications
Language: en
Pages: 2504
Authors: Dinesh K. Aswal
Categories: Technology & Engineering
Type: BOOK - Published: 2023-08-23 - Publisher: Springer Nature

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​This handbook provides comprehensive and up-to-date information on the topic of scientific, industrial and legal metrology. It discusses the state-of-art rev