Fundamental Aspects Of Silicon Oxidation
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Fundamental Aspects of Silicon Oxidation
Author | : Yves J. Chabal |
Publisher | : Springer Science & Business Media |
Total Pages | : 269 |
Release | : 2012-12-06 |
Genre | : Technology & Engineering |
ISBN | : 3642567118 |
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Discusses silicon oxidation in a tutorial fashion from both experimental and theoretical viewpoints. The authors report on the state of the art both at Lucent Technology and in academic research. The book will appeal to researchers and advanced students.
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Silicon (Si) is by far the most widely used semiconductor material for power devices. On the other hand, Si-based power devices are approaching their material l