Fabrication Engineering At The Micro And Nanoscale
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Fabrication Engineering at the Micro and Nanoscale
| Author | : Stephen A. Campbell |
| Publisher | : OUP USA |
| Total Pages | : 0 |
| Release | : 2008-01-10 |
| Genre | : Technology & Engineering |
| ISBN | : 9780195320176 |
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Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, the third edition of Fabrication Engineering at the Micro and Nanoscale provides a thorough and accessible introduction to all fields of micro and nano fabrication.
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