Fabrication and Characterization of Aluminum Nitride Thin Films Deposited by RF Magnetron Sputtering

Fabrication and Characterization of Aluminum Nitride Thin Films Deposited by RF Magnetron Sputtering
Author: William A. Carrington
Publisher:
Total Pages: 146
Release: 1991
Genre:
ISBN:


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Fabrication and Characterization of Aluminum Nitride Thin Films Deposited by RF Magnetron Sputtering
Language: en
Pages: 146
Authors: William A. Carrington
Categories:
Type: BOOK - Published: 1991 - Publisher:

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Aluminum Nitride Thin Films - Deposition for Fabrication, Characterization and Fabrication of Surface Acoustic Wave Devices
Language: en
Pages: 124
Authors: Charlee Fansler
Categories: Technology & Engineering
Type: BOOK - Published: 2008 - Publisher:

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Aluminum Nitride (AlN) thin films can be used for many device applications; for example, Surface Acoustic Wave (SAW) devices, microelectromechanical systems (ME
Fabrication and Characterization of Silicon Nitride Thin Film Planar Waveguides Produced by RF Magnetron Sputtering Technique
Language: en
Pages: 125
Authors: Uzair Majeed
Categories: Chemical vapor deposition
Type: BOOK - Published: 2016 - Publisher:

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Aluminum Nitride Thin Films for MEMS Resonators
Language: en
Pages: 530
Authors: Vanni Lughi
Categories:
Type: BOOK - Published: 2006 - Publisher:

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High quality aluminum nitride films, meeting all the requirements for the fabrication of the resonators, were deposited at low temperature (
Pulsed DC Reactive Magnetron Sputtering of Aluminum Nitride Thin Films
Language: en
Pages:
Authors:
Categories:
Type: BOOK - Published: 2003 - Publisher:

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Aluminum nitride thin films have been deposited by pulsed DC reactive magnetron sputtering. The pulsed DC power provides arc-free deposition of insulating films