Electron Microscopy Of Semiconducting Materials And Ulsi Devices
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Electron Microscopy of Semiconducting Materials and ULSI Devices
Author | : Clive Hayzelden |
Publisher | : |
Total Pages | : 296 |
Release | : 1998 |
Genre | : Technology & Engineering |
ISBN | : |
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The first symposium on electron microscopy and materials for ultra-large scale integration (ULSI) at the Society's meeting attracted 34 papers by contributors from Asia, North America, and Europe. They cover specimen preparation and defect analysis in semiconductor devices; metallization, silicides, and diffusion barriers; the advanced characterization of ULSI structures, and semiconductor epitaxy and heterostructures. Annotation copyrighted by Book News, Inc., Portland, OR
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