Electrochemical Processing in ULSI Fabrication III

Electrochemical Processing in ULSI Fabrication III
Author: Panayotis C. Andricacos
Publisher: The Electrochemical Society
Total Pages: 262
Release: 2002
Genre: Computers
ISBN: 9781566772730


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"Held May 2000 in Toronto, Canada, as part of the 197th meeting of the Electrochemical Society."--Pref.


Electrochemical Processing in ULSI Fabrication III
Language: en
Pages: 262
Authors: Panayotis C. Andricacos
Categories: Computers
Type: BOOK - Published: 2002 - Publisher: The Electrochemical Society

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"Held May 2000 in Toronto, Canada, as part of the 197th meeting of the Electrochemical Society."--Pref.
Electrochemical Processing in ULSI Fabrication and Semiconductor/metal Deposition II
Language: en
Pages: 418
Authors: Panayotis C. Andricacos
Categories: Science
Type: BOOK - Published: 1999 - Publisher: The Electrochemical Society

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Electrochemical Processing in ULSI Fabrication and Semiconductor/metal Deposition
Language: en
Pages: 0
Authors:
Categories:
Type: BOOK - Published: 1999 - Publisher:

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Proceedings of the Symposia on Electrochemical Processing in ULSI Fabrication I
Language: en
Pages: 290
Authors: Electrochemical Society. Dielectric Science and Technology Division
Categories: Science
Type: BOOK - Published: 1999 - Publisher:

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Electrochemical Processing in ULSI and MEMS 3
Language: en
Pages: 288
Authors: John O. Dukovic
Categories: Science
Type: BOOK - Published: 2007-09 - Publisher: The Electrochemical Society

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The papers in this issue describe the latest advances in fundamental and practical aspects of electrochemical processes for fabrication of microelectronic devic