Effect of Interface Fields on the Piezoelectric Response of Aluminum Nitride Thin Films

Effect of Interface Fields on the Piezoelectric Response of Aluminum Nitride Thin Films
Author: John Preston Harman
Publisher:
Total Pages:
Release: 2008
Genre: Aluminum nitride
ISBN:


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Effect of Interface Fields on the Piezoelectric Response of Aluminum Nitride Thin Films
Language: en
Pages:
Authors: John Preston Harman
Categories: Aluminum nitride
Type: BOOK - Published: 2008 - Publisher:

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Effect of Substrate Composition on the Piezoelectric Response of Reactively Sputtered AlN Thin Films
Language: en
Pages: 5
Authors:
Categories:
Type: BOOK - Published: 1999 - Publisher:

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Deposition parameters were found to have a marked effect on piezoelectric response of reactive radio frequency (RF) sputtered AlN thin films. The authors observ
Characterization of the Piezoelectric Response of Aluminum Nitride Grown by DC Magnetron Sputtering for Applications in Thin-film Resonators
Language: en
Pages: 14
Piezoelectric Energy Harvesting
Language: en
Pages: 377
Authors: Alper Erturk
Categories: Technology & Engineering
Type: BOOK - Published: 2011-04-04 - Publisher: John Wiley & Sons

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The transformation of vibrations into electric energy through the use of piezoelectric devices is an exciting and rapidly developing area of research with a wid
Piezoelectric Aluminum Nitride Thin Films by PECVD
Language: en
Pages: 432
Authors: Gustavo Sanchez Mathon
Categories:
Type: BOOK - Published: 2009 - Publisher:

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Polycrystalline aluminum nitride thin films were produced with a microwave-plasma enhanced chemical vapor deposition technique. The plasma-injector distance, th